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Laser
Excimer Laser



The excimer laser has high pulse energy and it's used in the semiconductor industry market and medical market.
Optopia handle excimer lasers that are easy to use.
They are mainly used in laboratories and medical markets.
Excimer Laser

CL-5000 series


The CL-5000 series is a small and compact excimer laser with high energy stability.
A newly developed Pseudo discharge switch realizes a long life, and PC control including output stabilization, adoption of a corona preionization method and adoption of a ceramic tube realize a long gas life. Of course, premixed gas can be used and the laser is very safe.
Datasheet PDF
CL-5000 series specification
Model name CL-5100 CL-5200 CL-5300
Gas type ArF KrF XeCl ArF KrF XeCl ArF KrF XeCl
Wavelength 193nm 248nm 308nm 193nm 248nm 308nm 193nm 248nm 308nm
Laser power 2W 4W 2.5W 4W 8W 5W 5W 10W 7W
Pulse energy 20mJ 40mJ 25mJ 20mJ 40mJ 25mJ 20mJ 40mJ 25mJ
Repetition frequency 1 - 100Hz 1 - 200Hz 1 - 300Hz
CLS-5000 series specification
Model name CLS-5000 Datasheet PDF
Gas type ArF KrF XeCl
Wavelength 193nm 248nm 308nm
Laser power 7.5W 12.5W 6W
Pulse energy 15mJ 25mJ 12mJ
Repetition frequency 1 - 500Hz

CL-7000 series


The CL-7000 series is a high energy type excimer laser with high energy stability.
A newly developed Pseudo discharge switch realizes a long service life, and PC control including output stabilization, a highly reliable thyratron switch, and a ceramic tube achieve a long service life. Of course, premixed gas can be used and the laser is very safe.
Datasheet PDF
CL-7000 series specification
Model name CL-7020 CL-7050 CL-7100 CL-7700
Gas type ArF KrF XeCl ArF KrF XeCl ArF KrF XeCl ArF KrF
Wavelength 193nm 248nm 308nm 193nm 248nm 308nm 193nm 248nm 308nm 193nm 248nm
Laser power 5W 8W 6W 15W 20W 15W 25W 35W 25W 15W 30W
Pulse energy 250mJ 400mJ 300mJ 250mJ 400mJ 300mJ 250mJ 400mJ 300mJ 350mJ 700mJ
Repetition frequency 1 - 20Hz 1 - 50Hz 1 - 100Hz 1 - 50Hz
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